海外真空メーカーの日本総代理店 株式会社テクノポート

取扱商品PRODUCT

HOME > 取扱商品 > IS40-PS ION SOURCE POWER SUPPLY
(IS 40E1 mode)

IS40-PS ION SOURCE POWER SUPPLY
(IS 40E1 mode)

DESCRIPTION

The IS40-PS power supply drives the IS40E1 Scanning Ion Source. It allows fine adjustment of the primary beam energy, ion density and beam profile (by adjustment of extractor, focus lenses, deflection and positioning elements). Up to 4 parameters can be varied via the digital encoder. The current status of each parameter is displayed on the large front panel LCD display. All settings can be manually adjusted or can be stored and recalled automatically after unit switch on. The unit also features a built in timer and automatic standby mode. Easy firmware update via USB port. Unit can be remotely controlled via RS232/485 or Ethernet interfaces.

DESCRIPTION

The IS40-PS power supply drives the IS40E1 Scanning Ion Source. It allows fine adjustment of the primary beam energy, ion density and beam profile (by adjustment of extractor, focus lenses, deflection and positioning elements). Up to 4 parameters can be varied via the digital encoder. The current status of each parameter is displayed on the large front panel LCD display. All settings can be manually adjusted or can be stored and recalled automatically after unit switch on. The unit also features a built in timer and automatic standby mode. Easy firmware update via USB port. Unit can be remotely controlled via RS232/485 or Ethernet interfaces.

ION SOURCE CONTROL APPLICATION

 

TECHNICAL DATA

Supply voltage            100 – 240 V, 50-60 Hz, (power consumption max 250 W)

Beam energy (E)           0 – 5 keV, resolution 0.01 keV, ripple < 0.2 Vpp

Emission current (le)       0.01 – 10 mA, resolution 0.01 mA

Focus (1,2) voltage        0 – 5000 V, resolution 1 V, ripple < 0.2 Vpp

Extractor voltage (Ex)     60 – 100 % of energy, resolution 0.1 %, ripple < 0.2 Vpp

Beam position (Px, Py)       -5 mm – 5 mm, resolution 0.01 mm

Scanning area (Δx, Δy)      10 mm × 10 mm, resolution 0.01 mm

Scanning speed (time/dot) 20 μs – 30 ms

Timer                            dual mode timer 0 s – 99 h 59 m

Vacuum measurement       CTR90, TTR91, TTR211, PTR225,

(optional)                       PTR90, ITR90, ITR100, Baratron,ANALOG IN, MKS937A, PG105,MG13/14, PKR251, PCR280,ATMION

Communication interface    RS232/485, Ethernet

Communication protocol     MODBUS-TCP

User interface                  7″ TFT display with touchscreen,digital encoder

Interface languages          English, German, Polish

Dimensions                    483 × 133 × 437 mm (W×H×D),19″ rack mountable

Weight (approx.)              12 kg

 

PAGETOP