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TDS 40A1 THERMAL DESORPTION SPECTROMETER

DESCRIPTION

The TDS 40A1 is designed for Temperature Programmed Desorption (TPD) applications, also known as Thermal Desorption Spectroscopy (TDS). TPD involves heating a sample under UHV conditions and simultaneously measuring a number of desorbing gas species as a function of sample temperature. A custom designed conical sampling end piece ensures the best possible response to desorbing species

FEATURES

  • Completely programmable
  • Unique filament design
  • Wide operation temperature range

OPTIONS

  • Quadrupole MS: 100, 200 or 300 amu
  • High stability linear shift
  • Differential pumping (1 stage)

TECHNICAL DATA

Mounting flange            DN 40CF (non-rotatable)

Bakeout temperature      up to 150 °C

Insertion length             190 mm (other on request)
OD: 36.8 mm

Mass range                  1 to 300 amu

Mass filter                    quadrupole

Detector type               electron multiplier (EM)

Resolution                    better than 0.5 amu

Sensitivity                     2×10-4 A/Torr (FC), <200 A/Torr (EM)

Minimum detectable        5×10-11 Torr (FC), 5×10-14 Torr (EM)

partial pressure

Working pressure            < 10-4 Torr to UHV (FC)
< 10-6 Torr to UHV (EM)

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