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1kw HiPIMS
パルス電源

HIPSTER 1
1kw HiPIMS
パルス電源

Ionautics has developed a new ultra-fast HiPIMS power supply to meet the needs of future HiPIMS processes. It is a 1 kW HiPIMS unit for R&D departments and academia and suitable for magnetron sizes up to 50 cm2 or approximately 3 inch circular targets.

Full range test

Tested for a full range of magnetrons and processes
(incl. reactive HiPIMS) at the Royal Institute of
Technology (KTH), Stockholm.

Stable and robust

Stable and robust discharge process (constant voltage
and no unwanted oscillations)

Externally triggered

Externally triggered and can also be controlled in
master-slave configuration (multiple power supplies).

Need a DC driving unit?

The HiPSTER series offer an easy upgrade of an existing magnetron deposition system to true
HiPIMS. If you already have a DC power supply capable of delivering ~1000 V and ~1 kW then all
you need is the HiPSTER 1 unit.

If you also need a DC driving unit then please have a look at the HiPSTER DCPSU:s and contact us
for a package deal.

Reactive HiPIMS process control

option can be implemented upon request. This feature allows:

Stable operation in the transition mode
Wide process window of reactive gas flow with maintained stoichiometric composition

Output Specifications

Average Power: 1000 W
Peak Voltage: 1000 V
Peak Current: 100 A
Regulation Modes: Voltage, Current, Power, Puls current
Pulse frequency: 1-10000 Hz
Pulse Duration: 2.5 µs to 1000 µs
Arc control: reaction time < 2 µs

Dimensions

19″ rack (3U)
135 mm (H) x 483 mm (W) x 390mm (D)
Weight: ≈ 5 kg

Input Specifications

  • Input Voltage: AC 1 phase + N, 100-240 VAC,
  • 50/60 Hz
  • Input Current at 230 V: 0.3 A
  • DC Charging Input: 1000 V max, positive
  • grounded

Environmental Specifications

  • Operating Temperature: +5ºC to +40ºC
  • Storage Temperature: -25ºC to +55ºC
  • Relative Humidity: max 85% non condensing
  • Air Pressure: 80 kPa to 106 kPa
  • Cooling: Air Cooling
  • Pollution degree: 2 (or better). Cooling air
  • must normally be free of corrosive vapos and conductive particles
  • Norms: CE marked

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