海外真空メーカーの日本総代理店　株式会社テクノポート

DESCRIPTION

The Ion Source IS 40C1 is a compact, easy-to-use extractor type ion gun for sample surface cleaning. The source generates an ion current of >70 μA/cm2 (Argon) with Gaussian beam profile. The source insertion length is adaptable to individual requirements (between 62.5 mm – 384.5mm, other on request).

FEATURES

• Operation with inert (Ar) & reactive gases(O2, H2, hydrocarbons with reduced lifetime)
• High Ion Beam Current
• Long lifetime
• High stability

OPTIONS

• Gas dosing system
• Customised insertion length

TECHNICAL DATA

Mounting flange       　　　   DN 40CF (non-rotatable)

Energy range      　　　　       0.12 keV – 5 keV

Current density     　　　     > 120 μA / cm2 (for distance 30 mm)

Cathode type       　　　　     yttrium oxide coated iridium

Insertion length     　　　      min. 62.5 mm, other on request
OD: max. 37 mm

Beam diameter    　　　　      dependent on ion energy

(FWHM)       　　　　　　           and working distance (e.g. 3 mm for distance 30 mm)

Typical working     　　　　      30 – 250 mm

distance

Bakeout temperature  　　　   up to 250 °C

Working pressure      　　　　    10-5 – 10-6 mbar